Fidelity of soft nano-imprint lithographic replication of polymer masters fabricated by two-photon polymerization

RecordNumber :

640

Author :

C. Ohrt, Y. Acar, A. Seidel, W. Cheng, R. Kiyan and B. N. Chichkov

Title of Article :

Fidelity of soft nano-imprint lithographic replication of polymer masters fabricated by two-photon polymerization

Title Of Journal :

The International Journal of Advanced Manufacturing Technology

Volume :

Issue :

42008

Page :

103-108

DOI :

10.1007/s00170-011-3888-z

Year :

2012

Link To Document :