A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

RecordNumber :

1008

Author :

P. Zhou, D. Guo, R. Kang and Z. Jin

Title of Article :

A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing

Title Of Journal :

The International Journal of Advanced Manufacturing Technology

Volume :

Issue :

42132

Page :

1009-1016

DOI :

10.1007/s00170-013-5108-5

Year :

2013

Link To Document :